Whispering gallery mode resonance based sphere measurement |
Micro/nano-fiber measurement using scattered light interference |
External cavity based dimensional measurement |
Whispering gallery mode resonance based sphere measurement |
Micro/nano-fiber measurement using scattered light interference |
External cavity based dimensional measurement |
Fabry–Pérot interferometer for nano-precise length gauge |
In-process measurement of nano-thick film using evanescent light |
Fluorescent microscopy for 3-dimensional geometrical structure |
Laser trapping of microsphere(s)
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Laser trapping based surface sensor for micro-CMM |
Additive manufacturing with optical radiation pressure |